Onto Innovation Inc.
US ˙ NYSE ˙ US6833441057

SecurityONTO / Onto Innovation Inc.
InstitutionMacquarie Group Ltd
Latest Disclosed Ownership0 shares
Latest Disclosed Value $ 0
Macquarie Group Ltd closes position in ONTO / Onto Innovation Inc.

On May 15, 2026 - Macquarie Group Ltd filed a 13F-HR form disclosing ownership of 0 shares of Onto Innovation Inc. (US:ONTO) valued at $0 USD as of March 31, 2026. The entity filed a previous 13F-HR on February 13, 2026 disclosing 96 shares of Onto Innovation Inc.. The current value of the position is $0 USD.

Institutional Ownership: 13F and NPORT Filings

The Security and Class in the table below are shown exactly as filed by the investor. We do our best to track continuity of investments through acquisitions, and this will be reflected in the table as changes in names. In addition to descriptive data, performance of the investment is shown over time. To calculate quarterly performance, we first calculate cost basis of the shares purchased during the quarter, then use that to calculate gross profit. Quarterly return is Gross Profit / Starting Portfolio value.

Note that cost basis is calculated and stored in thousands, so small quarterly changes in shares frequently result in a cost basis of zero.

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Disclosed Equity Positions (from 13F/NPORT Filings)
File
Date		 Effective
Date		Form Security Class ID Avg Price
Paid (Est)		 Reported
Shares		 ΔShares ΔShares
(%)		 Reported
Value
(x1000)		 ΔValue
(%)		 Alloc
(%)		 ΔAlloc ΔAlloc (%) Cost Basis
(x1000)		 Unrealized
Gain/Loss
(x1000)
2026-05-15 2026-03-31 13F ONTO INNOVATION COM 683344105 0 -100.00 0
2026-02-13 2025-12-31 13F ONTO INNOVATION COM 683344105 96 -23,623 -99.60 15 -99.51 0.0001
2025-11-13 2025-09-30 13F ONTO INNOVATION COM 683344105 23,719 23,719 3,065 0.0036
2025-08-14 2025-06-30 13F ONTO INNOVATION COM 683344105 0 -1,000,817 -100.00 0 -100.00
2025-08-14 2025-03-31 13F/A-1 ONTO INNOVATION COM 683344105 1,000,817 464,265 86.53 121,439 35.80 0.1507
2025-05-15 2025-03-31 13F ONTO INNOVATION COM 683344105 1,000,817 464,265 121,439 0.0992
2025-02-14 2024-12-31 13F ONTO INNOVATION COM 683344105 536,552 -24,679 -4.40 89,427 -23.23 0.1085
2024-11-14 2024-09-30 13F ONTO INNOVATION COM 683344105 561,231 -61,485 -9.87 116,489 -14.80 0.1257
2024-08-09 2024-06-30 13F ONTO INNOVATION COM 683344105 622,716 217,302 53.60 136,724 86.24 0.1568
2024-05-14 2024-03-31 13F ONTO INNOVATION COM 683344105 405,414 85,685 26.80 73,412 50.17 0.0833
2024-02-14 2023-12-31 13F ONTO INNOVATION COM 683344105 319,729 54,920 20.74 48,887 44.77 0.0565
2023-11-14 2023-09-30 13F ONTO INNOVATION COM 683344105 264,809 -15,615 -5.57 33,768 3.39 0.0424
2023-10-27 2023-06-30 13F/A-2 ONTO INNOVATION COM 683344105 280,424 15,309 5.77 32,661 40.19 0.0373
2023-10-12 2023-06-30 13F/A-1 ONTO INNOVATION COM 683344105 280,424 15,309 32,661 0.0328
2023-08-14 2023-06-30 13F ONTO INNOVATION COM 683344105 280,424 15,309 32,661 0.0331
2023-06-01 2023-03-31 13F/A-1 ONTO INNOVATION COM 683344105 265,115 41,503 18.56 23,298 53.01 0.0277
2023-05-15 2023-03-31 13F ONTO INNOVATION COM 683344105 265,115 41,503 23,298 0.0214
2023-02-21 2022-12-31 13F ONTO INNOVATION COM 683344105 223,612 -111,875 -33.35 15,226 -29.37 0.0180
2022-11-14 2022-09-30 13F ONTO INNOVATION COM 683344105 335,487 -14,421 -4.12 21,558 -11.66 0.0264
2022-08-17 2022-06-30 13F/A-1 ONTO INNOVATION COM 683344105 349,908 33,444 10.57 24,403 -11.25 0.0274
2022-08-15 2022-06-30 13F ONTO INNOVATION COM 683344105 349,908 33,444 24,403 0.0087
2022-05-16 2022-03-31 13F ONTO INNOVATION COM 683344105 316,464 279,992 767.69 27,497 644.77 0.0209
2022-02-11 2021-12-31 13F Onto Innovation COM 683344105 36,472 -7,491 -17.04 3,692 16.25 0.0031
2021-11-12 2021-09-30 13F ONTO INNOVATION COM 683344105 43,963 0 0.00 3,176 -1.09 0.0027
2021-08-13 2021-06-30 13F ONTO INNOVATION COM 683344105 43,963 -4,736 -9.73 3,211 0.34 0.0026
2021-05-14 2021-03-31 13F ONTO INNOVATION COM 683344105 48,699 -2,450 -4.79 3,200 31.58 0.0045
2021-02-16 2020-12-31 13F ONTO INNOVATION COM 683344105 51,149 -3,959 -7.18 2,432 48.20 0.0036
2020-11-13 2020-09-30 13F ONTO INNOVATION COM 683344105 55,108 -2,103 -3.68 1,641 -15.76 0.0028
2020-08-11 2020-06-30 13F ONTO INNOVATION COM 683344105 57,211 2,325 4.24 1,948 19.66 0.0034
2020-05-15 2020-03-31 13F ONTO INNOVATION COM 683344105 54,886 3,190 6.17 1,628 -13.82 0.0033
2020-03-18 2019-12-31 13F/A-2 NANOMETRICS COM 630077105 51,696 2,270 4.59 1,889 17.18 0.0027
2020-02-28 2019-12-31 13F/A-1 NANOMETRICS COM 630077105 51,696 0 1,889 0.0027
2020-02-14 2019-12-31 13F NANOMETRICS COM 630077105 51,696 2,270 1,889 2,370.5349
2019-11-14 2019-09-30 13F NANOMETRICS COM 630077105 49,426 2,857 6.13 1,612 -0.25 0.0027
2019-11-06 2019-06-30 13F/A-2 NANOMETRICS COM 630077105 46,569 14,918 47.13 1,616 65.40 0.0027
2019-09-24 2019-06-30 13F/A-1 NANOMETRICS COM 630077105 46,569 0 1,616 0.0027
2019-08-14 2019-06-30 13F NANOMETRICS COM 630077105 46,569 14,918 1,616
2019-05-15 2019-03-31 13F NANOMETRICS COM 630077105 31,651 8 0.03 977 12.95 0.0017
2019-02-15 2018-12-31 13F NANOMETRICS COM 630077105 31,643 1,213 3.99 865 -24.26 0.0017
2018-11-15 2018-09-30 13F NANOMETRICS COM 630077105 30,430 -864 -2.76 1,142 3.07 0.0019
2019-03-21 2018-06-30 13F/A-1 NANOMETRICS COM 630077105 31,294 -17,971 -36.48 1,108 -16.38 0.0019
2018-08-14 2018-06-30 13F NANOMETRICS COM 630077105 31,294 -17,971 1,108
2018-05-11 2018-03-31 13F NANOMETRICS COM 630077105 49,265 -446 -0.90 1,325 6.94 0.0024
2018-02-14 2017-12-31 13F NANOMETRICS COM 630077105 49,711 785 1.60 1,239 -12.07 0.0022
2017-11-08 2017-09-30 13F NANOMETRICS COM 630077105 48,926 1,818 3.86 1,409 18.30 0.0025
2017-08-14 2017-06-30 13F NANOMETRICS COM 630077105 47,108 358 0.77 1,191 -16.36 0.0022
2017-05-15 2017-03-31 13F Nanometrics COM 630077105 46,750 -6,665 -12.48 1,424 6.35 0.0026
2017-03-30 2016-12-31 13F/A-1 Nanometrics COMMON 630077105 53,415 -7,400 -12.17 1,339 -1.47 0.0026
2017-02-15 2016-12-31 13F Nanometrics COMMON 630077105 53,415 1,339
2016-11-15 2016-09-30 13F NANOMETRICS COMMON 630077105 60,815 -24,725 -28.90 1,359 -23.57 0.0026
2016-09-14 2016-06-30 13F/A-1 NANOMETRICS COMMON 630077105 85,540 85,540 1,778 0.0035
2016-08-15 2016-06-30 13F NANOMETRICS COMMON 630077105 85,540 1,778 0.0035
Legend
Shares
The total number of shares held by the institution at the end of the reporting period (the effective date). This is provided in the filing.
Value
The total value of the shares as of the effective date. This is provided in the filing.
Avg. Share Price
The weighted average share price of the shares held by the institution. We use FIFO accounting to determine this price
Class
This is the security class as indicated by the filer. There are a variety of values for this field. Common values include "EC" = equity common, "EP" - equity preferred
Allocation (%)
The percent of the institution's portfolio that this position represents. This is provided in NPORT filings. For 13F filings, we calculate it.
Change in Allocation
The change in allocation from the prior reporting period. This is calculated as current allocation - prior allocation.
Change in Allocation (%)
The percent change in allocation from the prior reporting period. This is calculated as (current allocation - prior allocation) / prior allocation.
Cost Basis
The total cost of the shares held. This is calculated as reported shares * avg. share price
Unrealized Gain/Loss
This is the market value of the position as of the effective date minus the cost basis.