Axcelis Technologies, Inc.
MX ˙ BMV ˙ US0545402085
SecurityMX:ACLS / Axcelis Technologies, Inc.
InstitutionMorgan Stanley
Latest Disclosed Ownership581,636 shares
Latest Disclosed Value $ 54,138,745
Morgan Stanley reports 66.08% increase in ownership of ACLS / Axcelis Technologies, Inc.

On May 15, 2026 - Morgan Stanley filed a 13F-HR form disclosing ownership of 581,636 shares of Axcelis Technologies, Inc. (MX:ACLS) valued at $54,138,745 USD as of March 31, 2026. The entity filed a previous 13F-HR/A on May 27, 2026 disclosing 350,220 shares of Axcelis Technologies, Inc.. This represents a change in shares of 66.08% during the quarter.

Institutional Ownership: 13F and NPORT Filings

The Security and Class in the table below are shown exactly as filed by the investor. We do our best to track continuity of investments through acquisitions, and this will be reflected in the table as changes in names. In addition to descriptive data, performance of the investment is shown over time. To calculate quarterly performance, we first calculate cost basis of the shares purchased during the quarter, then use that to calculate gross profit. Quarterly return is Gross Profit / Starting Portfolio value.

Note that cost basis is calculated and stored in thousands, so small quarterly changes in shares frequently result in a cost basis of zero.

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Disclosed Equity Positions (from 13F/NPORT Filings)
File
Date		 Effective
Date		Form Security Class ID Avg Price
Paid (Est)		 Reported
Shares		 ΔShares ΔShares
(%)		 Reported
Value
(x1000)		 ΔValue
(%)		 Alloc
(%)		 ΔAlloc ΔAlloc (%) Cost Basis
(x1000)		 Unrealized
Gain/Loss
(x1000)
2026-05-15 2026-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 581,636 231,416 66.08 54,139 92.42 0.0033
2026-05-27 2025-12-31 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 350,220 -103,867 -22.87 28,137 -36.54 0.0017
2026-02-13 2025-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 350,220 -103,867 28,137 0.0017
2026-05-27 2025-09-30 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 454,087 -96,074 -17.46 44,337 15.64 0.0027
2025-11-14 2025-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 454,087 -96,074 44,337 0.0027
2025-08-15 2025-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 550,161 42,781 8.43 38,341 52.14 0.0025
2025-05-15 2025-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 507,380 11,897 2.40 25,202 -27.20 0.0018
2025-05-15 2024-12-31 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 495,483 -180,439 -26.70 34,619 -51.15 0.0024
2025-02-14 2024-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 495,483 -180,439 34,619 0.0024
2025-05-14 2024-09-30 13F/A-2 AXCELIS TECHNOLOGIES COM NEW 054540208 675,922 38,286 6.00 70,871 -21.83 0.0051
2025-02-14 2024-09-30 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 675,922 38,286 70,871 0.0051
2024-11-14 2024-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 675,922 38,286 70,871 0.0051
2025-05-14 2024-06-30 13F/A-2 AXCELIS TECHNOLOGIES COM NEW 054540208 637,636 -14,541 -2.23 90,666 24.66 0.0070
2024-10-17 2024-06-30 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 637,636 -14,541 90,666 0.0070
2024-08-14 2024-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 637,636 -14,541 90,666 0.0070
2024-10-17 2024-03-31 13F/A-2 AXCELIS TECHNOLOGIES COM NEW 054540208 652,177 184,353 39.41 72,731 19.88 0.0058
2024-08-16 2024-03-31 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 652,177 184,353 72,731 0.0007
2024-05-15 2024-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 652,177 184,353 72,731 0.0058
2024-08-16 2023-12-31 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 467,824 135,246 40.67 60,672 11.89 0.0053
2024-02-13 2023-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 467,824 135,246 60,672 0.0053
2023-11-15 2023-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 332,578 -68,918 -17.17 54,227 -26.33 0.0055
2023-08-14 2023-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 401,496 15,363 3.98 73,606 43.06 0.0073
2023-05-15 2023-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 386,133 30,075 8.45 51,452 82.09 0.0055
2023-02-14 2022-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 356,058 2,763 0.78 28,257 32.06 0.0032
2022-11-14 2022-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 353,295 -15,679 -4.25 21,396 5.74 0.0029
2022-10-27 2022-06-30 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 368,974 176,692 91.89 20,235 39.33 0.0026
2022-08-15 2022-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 368,974 176,692 20,235 0.0026
2022-10-27 2022-03-31 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 192,282 -44,000 -18.62 14,523 -17.56 0.0020
2022-05-13 2022-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 192,282 -44,000 14,523 0.0020
2022-02-14 2021-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 236,282 34,890 17.32 17,617 86.03 0.0022
2021-11-15 2021-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 201,392 -84,039 -29.44 9,470 -17.91 0.0013
2021-08-23 2021-06-30 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 285,431 115,899 68.36 11,536 65.58 0.0015
2021-08-16 2021-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 285,431 115,899 11,536 0.0003
2021-05-17 2021-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 169,532 25,068 17.35 6,967 65.60 0.0010
2021-02-16 2020-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 144,464 41,288 40.02 4,207 85.41 0.0006
2020-11-13 2020-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 103,176 -22,376 -17.82 2,269 -35.12 0.0004
2020-08-14 2020-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 125,552 31,794 33.91 3,497 103.67 0.0008
2020-05-26 2020-03-31 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 93,758 -62,328 -39.93 1,717 -54.34 0.0005
2020-05-15 2020-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 93,758 -62,328 1,717 131.9014
2020-02-14 2019-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 156,086 49,141 45.95 3,760 105.69 0.0009
2019-11-14 2019-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 106,945 -37,437 -25.93 1,828 -15.88 0.0005
2019-08-14 2019-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 144,382 35,943 33.15 2,173 -0.41 0.0006
2019-05-15 2019-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 108,439 -293,778 -73.04 2,182 -69.53 0.0006
2019-02-14 2018-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 402,217 311,537 343.56 7,160 301.57 0.0021
2019-04-23 2018-09-30 13F/A-2 AXCELIS TECHNOLOGIES COM NEW 054540208 90,680 14,630 19.24 1,783 18.47 0.0004
2018-11-20 2018-09-30 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 90,680 0 1,783 0.0004
2018-11-14 2018-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 90,680 14,630 1,783
2019-04-23 2018-06-30 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 76,050 -90,107 -54.23 1,505 -63.18 0.0004
2018-08-14 2018-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 76,050 -90,107 1,505
2019-04-23 2018-03-31 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 166,157 -174,669 -51.25 4,087 -58.21 0.0011
2018-05-14 2018-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 166,157 -174,669 4,087
2019-04-23 2017-12-31 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 340,826 236,188 225.72 9,781 241.87 0.0027
2018-02-14 2017-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 340,826 236,188 9,781
2017-11-14 2017-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 104,638 26,676 34.22 2,861 75.20 0.0009
2017-08-11 2017-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 77,962 -11,973 -13.31 1,633 -3.37 0.0005
2017-05-22 2017-03-31 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 89,935 -13,364 -12.94 1,690 12.52 0.0005
2017-05-12 2017-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 89,935 1,690
2017-02-22 2016-12-31 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 103,299 97,885 1,808.00 1,502 1,986.11 0.0005
2017-02-13 2016-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 103,299 1,502
2016-11-10 2016-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 5,414 4,711 670.13 72 3,500.00 0.0000
2016-08-12 2016-06-30 13F AXCELIS TECHNOLOGIES COM 054540109 703 -20,241 -96.64 2 -96.61 0.0000
2016-05-12 2016-03-31 13F AXCELIS TECHNOLOGIES COM 054540109 20,944 -65,112 -75.66 59 -73.54 0.0000
2016-02-09 2015-12-31 13F AXCELIS TECHNOLOGIES COM 054540109 86,056 -6,271 -6.79 223 -9.72 0.0001
2016-02-08 2015-09-30 13F/A-1 AXCELIS TECHNOLOGIES COM 054540109 92,327 39,735 75.55 247 58.33 0.0001
2015-11-09 2015-09-30 13F AXCELIS TECHNOLOGIES COM 054540109 92,327 247
2015-08-12 2015-06-30 13F AXCELIS TECHNOLOGIES COM 054540109 52,592 13,171 33.41 156 65.96 0.0001
2015-05-14 2015-03-31 13F AXCELIS TECHNOLOGIES COM 054540109 39,421 16,474 71.79 94 56.67 0.0000
2015-02-13 2014-12-31 13F AXCELIS TECHNOLOGIES COM 054540109 22,947 -18,159 -44.18 60 -25.93 0.0000
2014-12-16 2014-09-30 13F/A-1 AXCELIS TECHNOLOGIES COM 054540109 41,106 -19,508 -32.18 81 -33.06 0.0000
2014-11-14 2014-09-30 13F AXCELIS TECHNOLOGIES COM 054540109 41,106 81
2014-08-12 2014-06-30 13F AXCELIS TECHNOLOGIES COM 054540109 60,614 -11,375 -15.80 121 -21.94 0.0002
2014-05-13 2014-03-31 13F AXCELIS TECHNOLOGIES COM 054540109 71,989 -30,602 -29.83 155 -38.00 0.0001
2014-02-13 2013-12-31 13F AXCELIS TECHNOLOGIES COM 054540109 102,591 9,088 9.72 250 27.55 0.0001
2013-11-13 2013-09-30 13F AXCELIS TECHNOLOGIES INC COM 054540109 93,503 79,402 563.09 196 653.85 0.0001
2013-08-08 2013-06-30 13F AXCELIS TECHNOLOGIES INC COM 054540109 14,101 14,101 26 0.0000
Legend
Shares
The total number of shares held by the institution at the end of the reporting period (the effective date). This is provided in the filing.
Value
The total value of the shares as of the effective date. This is provided in the filing.
Avg. Share Price
The weighted average share price of the shares held by the institution. We use FIFO accounting to determine this price
Class
This is the security class as indicated by the filer. There are a variety of values for this field. Common values include "EC" = equity common, "EP" - equity preferred
Allocation (%)
The percent of the institution's portfolio that this position represents. This is provided in NPORT filings. For 13F filings, we calculate it.
Change in Allocation
The change in allocation from the prior reporting period. This is calculated as current allocation - prior allocation.
Change in Allocation (%)
The percent change in allocation from the prior reporting period. This is calculated as (current allocation - prior allocation) / prior allocation.
Cost Basis
The total cost of the shares held. This is calculated as reported shares * avg. share price
Unrealized Gain/Loss
This is the market value of the position as of the effective date minus the cost basis.